Application of highly charged ions. Application of highly charged ions for nanotechnology

The characteristics of interaction of highly charged ion to material surface are described. Next, several investigations as the topics related to nanotechnology are outlined, (1) a nanostructure is formed at a material surface by the irradiation of highly charged ion or composite processes (2) a highly charged ion is processed to an ion beam of nanometer size and the ion implantation is achieved with a single-ion in the semiconductor process (single-ion implantation) (3) the secondary electron and secondary ion occurred by the collision of highly charged ion are applied to surface analysis. (M.H.)