EUV multilayer coatings for the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory

Multilayer coatings for the 7 EUV channels of the AIA have been developed and completed successfully on all AIA flight mirrors. Mo/Si coatings (131, 171, 193.5, 211 (angstrom)) were deposited at Lawrence Livermore National Laboratory (LLNL). Mg/SiC (304, 335 (angstrom)) and Mo/Y (94 (angstrom)) coatings were deposited at Columbia University. EUV reflectance of the 131/335 (angstrom), 171 (angstrom), 193.5/211 (angstrom) primary and secondary flight mirrors and the 94/304 (angstrom) secondary flight mirror was measured at beamline 6.3.2. of the Advanced Light Source (ALS) at LBNL. EUV reflectance of the 94/304 (angstrom) primary and secondary flight mirrors was measured at beamline X24C of the National Synchrotron Light Source (NSLS) at Brookhaven National Lab. Preliminary EUV reflectance measurements of the 94, 304 and 335 (angstrom) coatings were performed with a laser plasma source reflectometer located at Columbia University. Prior to multilayer coating, Atomic Force Microscopy (AFM) characterization and cleaning of all flight substrates was performed at LLNL