Published July 16, 1986
| Version v1
Journal article
Simple estimates of recoil implantation quantities
Creators
- 1. Universitat d'Alacant (Spain). Dept. de Fisica
Description
A recent theoretical model of recoil implantation is expanded to account for any power-law potential governing the sequence of atomic collisions initiated by an ion beam. The contribution to the recoil yields and depth profiles, of both primary and cascade recoil processes, can be estimated. The predictions are compard with some available experimental data. (author)
Additional details
Publishing Information
- Journal Title
- Phys. Status Solidi A
- Journal Volume
- 96
- Journal Issue
- 1
- Series
- Phys. Status Solidi A.
- Journal Page Range
- 161-166
- ISSN
- 0031-8965
- CODEN
- PSSAB
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- German Democratic Republic
- INIS RN
- 18003532
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- DEPTH; ION BEAMS; ION IMPLANTATION; ION-ATOM COLLISIONS; KNOCK-ON; OXYGEN; PHYSICAL RADIATION EFFECTS; POTENTIALS; RECOILS; SILICON; SPATIAL DISTRIBUTION
- Descriptors DEC
- ATOM COLLISIONS; BEAMS; COLLISIONS; DIMENSIONS; DISTRIBUTION; ELEMENTS; ION COLLISIONS; NONMETALS; RADIATION EFFECTS; SEMIMETALS