Published November 1975
| Version v1
Journal article
Study of a field-ionization source for microprobe applications
Description
Operating parameters for a field-ionization source have been measured. Sensitivities of 5x10-5 A sr-1 Torr-1 were found at 77 K. Angular distributions are uniform near theta=0degree and show the beam to be confined to +-20degree. The beam signal-to-noise ratio was found to increase with increasing current. Calculations based on parameters of lenses in use indicate a resolution of 0.1 μm at approximately-greater-than10-10 A is possible
Additional details
Identifiers
- DOI
- 10.1116/1.568497;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology
- Journal Volume
- 12
- Journal Issue
- 6
- Series
- J. Vac. Sci. Technol.
- Journal Page Range
- 1209-1213
- ISSN
- 0022-5355
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 7245381
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- ANGULAR DISTRIBUTION; EFFICIENCY; FIELD EMISSION; HYDROGEN; ION EMISSION; ION MICROPROBE ANALYSIS; ION SOURCES; IONIZATION; RESOLUTION; SENSITIVITY
- Descriptors DEC
- CHEMICAL ANALYSIS; DISTRIBUTION; ELEMENTS; EMISSION; NONDESTRUCTIVE ANALYSIS; NONMETALS
Optional Information
- Notes
- Updated automatically by Metadata and Full-Text Enrichment Agent