Auger electron and secondary ion spectrometer

Experimental equipment is described for combined Auger electron spectroscopy and secondary ion mass spectroscopy consisting of two assemblies, i.e., an ultrahigh-vacuum part with the two spectrometers and of a cabinet with the electric and recording part. The sample is bombarded with an electron beam from an electron gun and secondary electrons are analyzed with the Auger electron spectrometer and recorded. At the same time the sample may be bombarded with ions from an ion source and secondary ions analyzed with a mass filter. The Auger electron spectrometer is a cylindrical mirror analyzer with a bending angle of 37.4deg. The secondary ion spectrometer consists of a monopole mass spectrometer, a preliminary energy filter and a Penning-type ion source. Examples of Auger electron spectra and of positive secondary ion spectra of a Ti sample are shown. The combined equipment yields complex information on the state and composition of the surface of the analyzed materials. (Oy)