Published September 4, 1985 | Version v1
Patent Metadata-only

Measuring probe for the layer thickness gauging of thin metal layers

Creators

Description

The invention refers to a measuring probe for the layer thickness gauging of thin metallic or metalliferous coatings at surfaces mostly of metallic substrates. Thickness gaugings of electrode coatings with different compositions are possible using the beta back-scatter method or X-ray fluorescence analysis. The layer thickness gauging is insensible to measuring geometry deviations. For the beta and X-ray detection the same detector is used

Availability note (English)

Available from BUCHEXPORT, DDR-7010 Leipzig.

Additional details

Additional titles

Original title (German)
Messsonde fuer die Schichtdickenmessung duenner Metallschichten

Publishing Information

Imprint Pagination
vp.
IPC:
Int. Cl. G01b 15/02.
IPC
Int. Cl. G01b 15/02.
Patent number
DD patent document 226954/A/

INIS

Country of Publication
German Democratic Republic
Country of Input or Organization
German Democratic Republic
INIS RN
17028712
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Non-conventional Literature
Descriptors DEI
BETA DETECTION; COATINGS; ELECTRODES; LAYERS; METALS; RADIOMETRIC GAGES; SURFACES; THICKNESS GAGES; X-RAY DETECTION; X-RAY FLUORESCENCE ANALYSIS
Descriptors DEC
CHARGED PARTICLE DETECTION; CHEMICAL ANALYSIS; DETECTION; ELEMENTS; MEASURING INSTRUMENTS; NONDESTRUCTIVE ANALYSIS; RADIATION DETECTION; X-RAY EMISSION ANALYSIS