Quantification of Multilayer Samples by Confocal μXRF

The confocal setup consists of x-ray lenses in the excitation as well as in the detection channel. In this configuration, a micro volume defined by the overlap of the foci of both x-ray lenses is analyzed. Scanning this micro volume through the sample, 1-3 dimensional studies can be performed. For intermediate thin homogeneous layers a scanning in the normal direction to the surface sample provides information of its thickness and elemental composition. For multilayer samples it also provides the order of each layer in the stratified structure. For the confocal setup, we used a glass monocapillary in the excitation channel and a monolithic half polycapillary in the detection channel. The experiment was carried out at the D09B beamline of the LNLS using white beam. In the present work, a new algorithm was applied to analyze in detail by confocal μXRF a sample of three paint layers on a glass substrate. Using the proposed algorithm, information about thickness and elemental densities was obtained for each layer of these samples.