Modification of the surface structure of silicon with natural and artificially grown oxide by ion irradiation method

Published 2019 | Version v1

Miscellaneous Metadata-only

1. Institute for Nuclear Research, National Academy of Sciences of Ukraine, Kyiv (Ukraine)
2. V. Lashkaryov Institute of Semiconductor Physics of the NAS of Ukraine, Kyiv (Ukraine)
3. Institute for Nuclear Research of the NAS of Ukraine, Kyiv (Ukraine)

no abstract available

Additional details

Original title (Ukrainian): Modifyikatsyiya strukturi poverkhnyi kremnyiyu z prirodnim ta zyi shtuchno naroshchenim okislom metodom yionnogo opromyinennya

Publisher: INR NAS of Ukraine
Imprint Place: Kyiv (Ukraine)
Imprint Title: Book of abstract of 26th annual scientific conference of Institute for Nuclear Research of National Academy of Sciences of Ukraine
Imprint Pagination: 204 p.
Journal Page Range: p. 105-106
Report number: INIS-UA--202

Title: 26. annual scientific conference of Institute for Nuclear Research of National Academy of Sciences of Ukraine
Original Conference Title: Tezi dopovyidej 26 shchoryichnoyi naukovoyi konferentsyiyi Yinstitutu Yadernikh Doslyidzhen' Natsyional'noyi Akademyiyi Nauk Ukrayini
Dates: 8-12 Apr 2019
Place: Kyiv (Ukraine)

Country of Publication: Ukraine
Country of Input or Organization: Ukraine
INIS RN: 50056569
Subject category: S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator: Conference, No Abstract, Non-conventional Literature
Descriptors DEI: ION BEAMS; IRRADIATION; MEASURING METHODS; OPTICAL PROPERTIES; OXIDES; SILICON; SURFACE COATING; THICKNESS
Descriptors DEC: BEAMS; CHALCOGENIDES; DEPOSITION; DIMENSIONS; ELEMENTS; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SEMIMETALS

Notes: Imprint:26. shchoryichna naukova konferentsyiya Yinstitutu Yadernikh Doslyidzhen' Natsyional'noyi Akademyiyi Nauk Ukrayini