Published 1979 | Version v1
Book

Depth-analysis of defects in the surface layer by means of glancing scattering of MeV ions

  • 1. Nagoya Univ. (Japan). Faculty of Engineering

Description

no abstract available

Additional details

Publishing Information

Publisher
Inst. of Electr. Eng. of Japan.
Imprint Place
Tokyo, Japan
Imprint Title
Proceedings of the third symposium on ion sources and application technology
Journal Page Range
p. 223-225.

Conference

Title
3. symposium on ion sources and application technology.
Dates
19 - 22 Feb 1979.
Place
Tokyo, Japan.

INIS

Country of Publication
Japan
Country of Input or Organization
Japan
INIS RN
11539273
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, Numerical Data, No Abstract
Descriptors DEI
ARGON IONS; ATOMIC IONS; CRYSTAL DEFECTS; DEPTH; DOSE RATES; EV RANGE 100-1000; EXPERIMENTAL DATA; GERMANIUM; GRAPHS; HELIUM IONS; IMPURITIES; ION BEAMS; IRRADIATION; LAYERS; SCATTERING; SPATIAL DISTRIBUTION
Descriptors DEC
BEAMS; CHARGED PARTICLES; CRYSTAL STRUCTURE; DATA; DATA FORMS; DIMENSIONS; DISTRIBUTION; ELEMENTS; ENERGY RANGE; EV RANGE; INFORMATION; IONS; METALS; NUMERICAL DATA

Optional Information

Notes
Published in summary form only.