Published July 1, 1986
| Version v1
Journal article
Growth of periodic structures in pyrolytic laser-deposited SiC
Creators
- 1. Center for Laser Studies, University of Southern California, Los Angeles, California 90089-1112
Description
Nonmelting surface interference ripples have been conclusively observed for the first time in thermally driven deposition of SiC from SiH4 and CH4. One set of ripples with a spatial frequency close to the primary beam wavelength (9.27 μm) is formed normal to the E field of the incident beam. An additional set of small-amplitude ripples of 1 μm or less in spacing and oriented parallel to the E field is also observed. These structural features are more pronounced in samples with higher melting points and completely disappear as the irradiated surface melts
Additional details
Publishing Information
- Journal Title
- J. Appl. Phys.
- Journal Volume
- 60
- Journal Issue
- 1
- Series
- J. Appl. Phys.
- Journal Page Range
- 470-472
- ISSN
- 0021-8979
- CODEN
- JAPIA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 17072097
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; LASER RADIATION; MELTING; MELTING POINTS; METHANE; MORPHOLOGICAL CHANGES; PHYSICAL RADIATION EFFECTS; SILANES; SILICON CARBIDES; SURFACES
- Descriptors DEC
- ALKANES; CARBIDES; CARBON COMPOUNDS; CHEMICAL COATING; DEPOSITION; ELECTROMAGNETIC RADIATION; HYDRIDES; HYDROCARBONS; HYDROGEN COMPOUNDS; ORGANIC COMPOUNDS; PHASE TRANSFORMATIONS; PHYSICAL PROPERTIES; RADIATION EFFECTS; RADIATIONS; SILICON COMPOUNDS; SURFACE COATING; THERMODYNAMIC PROPERTIES; TRANSITION TEMPERATURE