Published July 1, 1986 | Version v1
Journal article

Growth of periodic structures in pyrolytic laser-deposited SiC

  • 1. Center for Laser Studies, University of Southern California, Los Angeles, California 90089-1112

Description

Nonmelting surface interference ripples have been conclusively observed for the first time in thermally driven deposition of SiC from SiH4 and CH4. One set of ripples with a spatial frequency close to the primary beam wavelength (9.27 μm) is formed normal to the E field of the incident beam. An additional set of small-amplitude ripples of 1 μm or less in spacing and oriented parallel to the E field is also observed. These structural features are more pronounced in samples with higher melting points and completely disappear as the irradiated surface melts

Additional details

Publishing Information

Journal Title
J. Appl. Phys.
Journal Volume
60
Journal Issue
1
Series
J. Appl. Phys.
Journal Page Range
470-472
ISSN
0021-8979
CODEN
JAPIA