Morphological Specific Features of (100)-Textured Polycrystalline Diamond Films

The morphological specific features of (100)-textured polycrystalline diamond films, grown by chemical vapor deposition (CVD) and consisting of micrometer-sized crystallites and disordered carbon material, have been investigated. The grown films were heated in air to a temperature providing selective removal of low-ordered carbon material. The structural and morphological specific features of the samples were analyzed by electron microscopy. A model of the film-growth process is developed based on the experimental data obtained. The correspondence of the computer simulation based on this model with the experimental data confirms validity of this model.