Deposition of YBCO thin films by laser ablation and intense pulsed light ion beam evaporation

The pulsed laser deposition method (PLD) and the intense pulsed light ion beam evaporation method (IBE) of obtaining Y Ba2 Cu3 O7-x high Tc thin films are presented. The influence of various depositions parameters were investigated in case of PLD. In the case of a UV wavelength, the films in which the superconducting phase is predominant and have a favorable crystalline orientation are obtained, when the substrate is placed inside the laser-produced plasma, and heated to 720 deg C. Deposition using the long wavelength CO2 laser leads to films with poor morphology. We have investigated the IBE standard deposition configuration, front side deposition (IBE/FS), and a new one, back side deposition (IBE/BE). The IBE/BS method, permitted obtaining of high quality films, with a much improved surface morphology. The films deposited on a La Sr Ga O4 substrate have a significantly improved crystallinity in comparison with those deposited on Mg O. (authors)