Published December 2006 | Version v1
Journal article

2-D simulation and analysis of temperature effects on electrical parameters degradation of power RF LDMOS device

  • 1. LEMI, University of Rouen, IUT Rouen, 76821 Mont Saint Aignan (France)

Description

This paper presents a synthesis of temperature effects on power RF Laterally Diffused (LD) MOS performances, which can modify and degrade transistor physical and electrical behaviour. In this work, the temperature influence on device electrical characteristics is discussed with regard to physical limits for device operation. A developed 2-D structure was implemented and simulated using the physical simulator Silvaco-Atlas to explain the observed data and offer insight into the physical origin of LDMOS temperature behaviour. The temperature dependence of most important electrical parameters such as channel current I ds, threshold voltage V th and inter-electrodes capacitances (C ds, C gs) is investigated. The temperature effects on mobility, electron concentration, electric field, current flow lines and Fermi level are taken into account. Finally, initial failure analysis is discussed

Additional details

Identifiers

DOI
10.1016/j.nimb.2006.10.040;
PII
S0168-583X(06)01004-4;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
253
Journal Issue
1-2
Journal Page Range
p. 250-254
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
Symposium U, Si-based materials for advanced microelectronic devices: Synthesis, defects and diffusion
Acronym
E-MRS IUMRS ICEM 2006 spring meeting
Dates
29 May - 2 Jun 2006
Place
Nice (France)

Optional Information

Copyright
Copyright (c) 2006 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.