2-D simulation and analysis of temperature effects on electrical parameters degradation of power RF LDMOS device
- 1. LEMI, University of Rouen, IUT Rouen, 76821 Mont Saint Aignan (France)
Description
This paper presents a synthesis of temperature effects on power RF Laterally Diffused (LD) MOS performances, which can modify and degrade transistor physical and electrical behaviour. In this work, the temperature influence on device electrical characteristics is discussed with regard to physical limits for device operation. A developed 2-D structure was implemented and simulated using the physical simulator Silvaco-Atlas to explain the observed data and offer insight into the physical origin of LDMOS temperature behaviour. The temperature dependence of most important electrical parameters such as channel current I ds, threshold voltage V th and inter-electrodes capacitances (C ds, C gs) is investigated. The temperature effects on mobility, electron concentration, electric field, current flow lines and Fermi level are taken into account. Finally, initial failure analysis is discussed
Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2006.10.040;
- PII
- S0168-583X(06)01004-4;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 253
- Journal Issue
- 1-2
- Journal Page Range
- p. 250-254
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- Symposium U, Si-based materials for advanced microelectronic devices: Synthesis, defects and diffusion
- Acronym
- E-MRS IUMRS ICEM 2006 spring meeting
- Dates
- 29 May - 2 Jun 2006
- Place
- Nice (France)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 38040877
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CAPACITANCE; CURRENTS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRONS; EQUIPMENT; FAILURES; FERMI LEVEL; PERFORMANCE; SILICON OXIDES; SIMULATION; SIMULATORS; TEMPERATURE DEPENDENCE; TRANSISTORS
- Descriptors DEC
- ANALOG SYSTEMS; CHALCOGENIDES; ELECTRICAL PROPERTIES; ELEMENTARY PARTICLES; ENERGY LEVELS; FERMIONS; FUNCTIONAL MODELS; LEPTONS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SEMICONDUCTOR DEVICES; SILICON COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2006 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.