Published August 13, 2007 | Version v1
Journal article

Spatial investigation of the electron energy distribution function of the high-energy electron beam sustained in the low-pressure microwave surface-wave plasma

  • 1. Graduate School of Electronic Science and Technology, Shizuoka University, Hamamatsu 432-8011 (Japan)
  • 2. Innovative Joint Research Center, Shizuoka University, Hamamatsu 432-8561 (Japan)

Description

The electron energy distribution functions are studied in low-pressure microwave surface-wave sustained plasma using retarding field analyzer. Sustained discharge can be considered as superposition of the bulk plasma and the high-energy electron beamlike part. The beam component energy is pronounced up to 40 eV. Beam population reaches the maximum at energy of 16 eV with amount of 4% of the bulk plasma population

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
91
Journal Issue
7
Journal Page Range
p. 071501-071501.3
ISSN
0003-6951
CODEN
APPLAB

Optional Information

Notes
(c) 2007 American Institute of Physics