Published 1992
| Version v1
Miscellaneous
Ion flux angular and energy distribution in target under ion implantation
Creators
Description
Short communication. 1 refs
Additional details
Additional titles
- Original title (Russian)
- Угловое и энергетическое распределение потока ионов в мишени при ионной имплантации
Publishing Information
- Imprint Title
- Summaries of reports of 22. Conference on physics of charged particle interaction with crystals
- Imprint Pagination
- 135 p.
- Journal Page Range
- p. 69.
- Report number
- INIS-SU--340/A
Conference
- Title
- 22. Conference on physics of charged particle interaction with crystals.
- Original Conference Title
- 22. Soveshchanie po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 25-27 May 1992.
- Place
- Moscow (Russian Federation).
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 24034996
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ANGULAR DISTRIBUTION; ARSENIC IONS; COMPUTERIZED SIMULATION; CRYSTALS; ION IMPLANTATION; PHOSPHORUS IONS; SILICON; SPATIAL DISTRIBUTION
- Descriptors DEC
- CHARGED PARTICLES; DISTRIBUTION; ELEMENTS; IONS; SEMIMETALS; SIMULATION
Optional Information
- Notes
- Imprint:ISBN 5-211-02990-3; published in Moscow State University.;Tezisy dokladov 22. Soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.