Published September 2004
| Version v1
Journal article
Twin formation in sputter-grown ZnO/Al2O3(0001) epitaxial film: A real time x-ray scattering study
Creators
- 1. Physics Department, Aristotle University of Thessaloniki, 540 06 Thessaloniki (Greece)
- 2. SIFCOM, UMR CNRS 6176, ENSICAEN 6 Boulevard du Juin, 14050 Caen Cedex (France)
- 3. Synchrotron X-ray Laboratory, Department of Materials Science and Engineering and Center for Information Materials, Pohang University of Science and Technology, Pohang 790-784 (Korea, Republic of)
Description
Twin formation and strain evolution in highly mismatched sputter-grown ZnO/Al2O3(0001) hereroepitaxial films were investigated using real time synchrotron x-ray scattering measurements and high resolution electron microscopy (HREM). We reveal the existence of a critical thickness at which the twin of the 30 deg. rotated domains starts to nucleate within the ZnO films, followed by gradual strain relaxation. Twin growth above the critical thickness stops as the strain almost fully relaxes. A HREM image shows that the twin nucleates 5-10 nm away from the interface as isolated domains, not as types of layers
Additional details
Identifiers
- DOI
- 10.1116/1.1778407;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Journal Volume
- 22
- Journal Issue
- 5
- Journal Page Range
- p. 2159-2162
- ISSN
- 0734-2101
- CODEN
- JVTAD6
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36079912
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ALUMINIUM OXIDES; CRYSTAL GROWTH; EPITAXY; NUCLEATION; SEMICONDUCTOR MATERIALS; STRESS RELAXATION; THICKNESS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; TWINNING; X-RAY DIFFRACTION; ZINC OXIDES
- Descriptors DEC
- ALUMINIUM COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; CRYSTAL GROWTH METHODS; DIFFRACTION; DIMENSIONS; ELECTRON MICROSCOPY; FILMS; MATERIALS; MICROSCOPY; OXIDES; OXYGEN COMPOUNDS; RELAXATION; SCATTERING; ZINC COMPOUNDS
Optional Information
- Notes
- (c) 2004 American Vacuum Society