Plasma-ablation of amorphous hydrocarbon layers in castellated structures

Published 2009 | Version v1

Journal article Metadata-only

1. Institut fuer Energieforschung - Plasmaphysik, Forschungszentrum Juelich, Assoziation EURATOM-FZJ, Trilaterales Euregio Cluster, 52425 Juelich (Germany)

no abstract available

Additional details

Original title (German): Plasma-Abtragung amorpher Kohlenwasserstoffschichten in kastellierten Strukturen

Journal Title: Verhandlungen der Deutschen Physikalischen Gesellschaft
Journal Issue: Greifswald 2009 issue
Series: Also available as printed version: Verhandlungen der Deutschen Physikalischen Gesellschaft v. 44(6)
Journal Page Range: [1 p.]
ISSN: 0420-0195
CODEN: VDPEAZ

Title: 2009 DPG Spring meeting with the divisions of plasma physics, short-time period physics, extraterrestrial physics
Original Conference Title: DPG-Fruehjahrstagung 2009 der Fachverbaende Plasmaphysik, Kurzzeitphysik, Extraterrestrische Physik
Dates: 30 Mar - 2 Apr 2009
Place: Greifswald (Germany)

Country of Publication: Germany
Country of Input or Organization: Germany
INIS RN: 41050162
Subject category: S36: MATERIALS SCIENCE; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator: Conference, No Abstract
Descriptors DEI: ABLATION; AMORPHOUS STATE; CARBON; DEPOSITION; EROSION; GLOW DISCHARGES; HYDROCARBONS; LAYERS; PLASMA; STEELS; THIN FILMS; TOROIDAL CONFIGURATION; WALL EFFECTS
Descriptors DEC: ALLOYS; ANNULAR SPACE; CARBON ADDITIONS; CLOSED CONFIGURATIONS; CONFIGURATION; ELECTRIC DISCHARGES; ELEMENTS; FILMS; IRON ALLOYS; IRON BASE ALLOYS; MAGNETIC FIELD CONFIGURATIONS; NONMETALS; ORGANIC COMPOUNDS; SPACE; TRANSITION ELEMENT ALLOYS