Ion implantation damage effects in silicon

In order to utilize ion implantation to the best advantage, lattice damage accompanying the process must be repaired, generally by annealing. Accordingly, optical reflection spectroscopy can be a valuable tool for observing the damage and studying the annealing of the damage. The motivation for understanding the implantation process is based on the fact that this process is not just a laboratory curiosity, but represents a device fabrication process that is superior in some cases to diffusion techniques.