Published February 2001 | Version v1
Journal article Metadata-only

A study on the properties of surface migration and adhesion during energetic cluster impact deposition

Creators

  • 1. Academia Sinica, Shanghai (China). Shanghai Inst. of Nuclear Research

Description

The surface morphology of organic material (CH3SiO3/2) bombarded by energetic cluster beam was investigated by Atomic Force Microscopy (AFM). The results showed that the migration and adhesion of cluster constituent atoms on the surface would be improved if the cluster energy gradually increased, accordingly improving the quality of film. Especially, the existence of convex stripes on the surface indicated the diffusion ability increased with the increasing cluster energy

Additional details

Publishing Information

Journal Title
Nuclear Techniques
Journal Volume
24
Journal Issue
2
Journal Page Range
p. 81-84
ISSN
0253-3219

INIS

Country of Publication
China
Country of Input or Organization
China
INIS RN
32029153
Subject category
S36: MATERIALS SCIENCE; S73: NUCLEAR PHYSICS AND RADIATION PHYSICS;
Descriptors DEI
ADHESION; CLUSTER BEAMS; ENERGY DEPENDENCE; MICROSCOPY; MORPHOLOGY; ORGANIC MATTER; SURFACES; THIN FILMS
Descriptors DEC
BEAMS; FILMS; MATTER