Peculiarities of low-energy ion beams formation in discharge with crossing ExH field

Mechanism of the steps ionization in discharge with crossing electric and magnetic fields at the voltage lower then ionization potential are proposed, for the ion beams with the energy 10 - 40 eV creation. The expression for determine of the discharge current and current of the ion beam in depends on geometry of acceleration channel, parameters of the magnetic field and electron emission are represented. It has been established that the magnitude of magnetic field induction along acceleration channel must be lower 15 mT, and electron temperature no more then several electron-volt. (authors)