Published October 2010
| Version v1
Journal article
Nanoscratch-induced phase transformation of monocrystalline Si
- 1. School of Mechanical and Mining Engineering, The University of Queensland, Qld 4072 (Australia)
- 2. Centre for Microscopy and Microanalysis, The University of Queensland, Qld 4072 (Australia)
- 3. School of Mechanical and Manufacturing Engineering, The University of New South Wales, NSW 2052 (Australia)
- 4. School of Electrical, Electronic and Computer Engineering, The University of Western Australia, WA 6009 (Australia)
Description
Deformation behaviors of monocrystalline Si induced by nanoscratching were systematically investigated by use of cross-sectional transmission electron microscopy and Raman spectroscopy. The study demonstrated that the lateral load in nanoscratching played a key role in the amorphization of Si, which led to a different phase transformation behavior when compared with the well-documented phase transformation route in nanoindentation.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.scriptamat.2010.06.034Additional details
Identifiers
- DOI
- 10.1016/j.scriptamat.2010.06.034;
- PII
- S1359-6462(10)00427-6;
Publishing Information
- Journal Title
- Scripta Materialia
- Journal Volume
- 63
- Journal Issue
- 8
- Journal Page Range
- p. 847-850
- ISSN
- 1359-6462
- CODEN
- SCMAF7
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 45024416
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- AMORPHOUS STATE; COMPARATIVE EVALUATIONS; DEFORMATION; MONOCRYSTALS; PHASE STABILITY; PHASE STUDIES; PHASE TRANSFORMATIONS; RAMAN SPECTROSCOPY; SILICON; TRANSMISSION ELECTRON MICROSCOPY
- Descriptors DEC
- CRYSTALS; ELECTRON MICROSCOPY; ELEMENTS; EVALUATION; LASER SPECTROSCOPY; MICROSCOPY; SEMIMETALS; SPECTROSCOPY; STABILITY
Optional Information
- Copyright
- Copyright (c) 2010 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.