Published 1971 | Version v1
Book

Effects of dose rate and implantation temperature on lattice damage and electrical activity in ion-implanted GaAs

Creators

Description

no abstract available

Additional details

Publishing Information

Publisher
Springer-Verlag New York, Inc.
Imprint Place
New York
Imprint Title
Ion Implantation in Semiconductors
Imprint Pagination
p. 157-167.

Conference

Title
2. international conference on ion implantation in semiconductors.
Dates
24 May 1971.
Place
Garmisch-Partenkirchen, Germany.

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
3029771
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ARSENIDES; CARBON IONS; CRYSTAL DEFECTS; DOPED MATERIALS; DOSE RATES; ELECTRICAL PROPERTIES; GALLIUM COMPOUNDS; ION IMPLANTATION; RADIATION EFFECTS; SILICON IONS; TEMPERATURE DEPENDENCE
Descriptors DEC
CHARGED PARTICLES; CRYSTAL STRUCTURE; IONS; PHYSICAL PROPERTIES