Published July 1, 2021 | Version v1
Journal article

Simulation of enhancement-mode recessed-gate p-channel HFETs based on polarization-induced doping and an InGaN/GaN/AlGaN heterostructure

  • 1. School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026 (China)
  • 2. Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, CAS, Suzhou, Jiangsu 215123 (China)
  • 3. State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics and Systems, School of Microelectronics, Fudan University, Shanghai 200433 (China)

Description

In this work, p-type polarization-induced doping (PID) recessed-gate p-channel InGaN/GaN/AlGaN heterostructure field-effect transistors (HFETs) are proposed. It is found that the current density of the device can be increased by introducing an InGaN/GaN/AlGaN heterojunction and p-type PID. The simulation results show that the current density can apparently be increased (from 3.42 mA mm−1 to 7.31 mA mm−1) due to the increased hole concentration introduced by the InGaN/GaN/AlGaN heterojunction and the p-type PID. Different threshold voltages can be obtained by adjusting the GaN channel thickness, and normally-off p-channel HFETs with a negative V TH of −1 V were produced when a 6 nm GaN channel thickness was retained. These results may provide some reference information for the design of E-mode high-performance p-channel GaN devices. (letter)

Availability note (English)

Available from http://dx.doi.org/10.1088/1361-6641/abfe9a

Additional details

Identifiers

Publishing Information

Journal Title
Semiconductor Science and Technology
Journal Volume
36
Journal Issue
7
Journal Page Range
[6 p.]
ISSN
0268-1242
CODEN
SSTEET