Published 2008
| Version v1
Miscellaneous
Open
Features of ion-implanted insulation of GaAs layers heavy-doped by acceptor impurities
Creators
- 1. Nauchno-Issledovatel'skij Fiziko-Technicheskij Inst. NNGU, Nizhnij Novgorod (Russian Federation)
Description
no abstract available
Files
39120593.pdf
Files
(68.2 kB)
| Name | Size | Download all |
|---|---|---|
|
md5:94d412e03ef2fca228f30d5a3ae8b005
|
68.2 kB | Preview Download |
System files
(4.4 kB)
| Name | Size | Download all |
|---|
Additional details
Additional titles
- Original title (Russian)
- Особенности ионно-имплантационной изоляции сильнолегированных акцепторными примесями слоев GaAs
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XXXVIII International conference on physics of interaction of charged particles with crystals
- Imprint Pagination
- 203 p.
- Journal Page Range
- p. 121
- Report number
- INIS-RU--514
Conference
- Title
- 38. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- XXXVIII mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 27-29 May 2008
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 39120593
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- CONCENTRATION RATIO; ELECTRIC CONDUCTIVITY; EXPERIMENTAL DATA; GALLIUM ARSENIDES; ION IMPLANTATION; KEV RANGE 10-100; MAGNESIUM IONS; MANGANESE IONS; RADIATION DOSES
- Descriptors DEC
- ARSENIC COMPOUNDS; ARSENIDES; CHARGED PARTICLES; DATA; DIMENSIONLESS NUMBERS; DOSES; ELECTRICAL PROPERTIES; ENERGY RANGE; GALLIUM COMPOUNDS; INFORMATION; IONS; KEV RANGE; NUMERICAL DATA; PHYSICAL PROPERTIES; PNICTIDES
Optional Information
- Notes
- Imprint:Tezisy dokladov XXXVIII mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami