Published November 24, 1998
| Version v1
Journal article
Development of a metrology method for composition and thickness of barium strontium titanate thin films
Creators
- 1. Semiconductor Technology, Semiconductor Products Sector, Motorola Inc., Mesa, Arizona, 85202 (United States)
- 2. Semiconductor Technology, Semiconductor Products Sector, Motorola Inc., Austin, Texas, 78721 (United States)
Description
Thin films of barium strontium titanate (BST) are being investigated as the charge storage dielectric in advanced memory devices, due to their promise for high dielectric constant. Since the capacitance of BST films is a function of both stoichiometry and thickness, implementation into manufacturing requires precise metrology methods to monitor both of these properties. This is no small challenge, considering the BST film thicknesses are 60 nm or less. A metrology method was developed based on X-ray Fluorescence and applied to the measurement of stoichiometry and thickness of BST thin films in a variety of applications
Additional details
Identifiers
- DOI
- 10.1063/1.56900;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 449
- Journal Issue
- 1
- Journal Page Range
- p. 278-282
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 1998 international conference on characterization and metrology for ULSI technology
- Dates
- 23-27 Mar 1998
- Place
- Gaithersburg, MD (United States)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 40072710
- Subject category
- S36: MATERIALS SCIENCE; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BARIUM; BARIUM COMPOUNDS; CAPACITANCE; DIELECTRIC MATERIALS; FLUORESCENCE; MANUFACTURING; MEMORY DEVICES; PERMITTIVITY; PHONONS; STOICHIOMETRY; STRONTIUM TITANATES; THICKNESS; THIN FILMS; X RADIATION; X-RAY FLUORESCENCE ANALYSIS
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; ALKALINE EARTH METALS; CHEMICAL ANALYSIS; DIELECTRIC PROPERTIES; DIMENSIONS; ELECTRICAL PROPERTIES; ELECTROMAGNETIC RADIATION; ELEMENTS; EMISSION; FILMS; IONIZING RADIATIONS; LUMINESCENCE; MATERIALS; METALS; NONDESTRUCTIVE ANALYSIS; OXYGEN COMPOUNDS; PHOTON EMISSION; PHYSICAL PROPERTIES; QUASI PARTICLES; RADIATIONS; STRONTIUM COMPOUNDS; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; X-RAY EMISSION ANALYSIS
Optional Information
- Notes
- (c) 1998 American Institute of Physics.