Atomic force microscope based biomolecular force-clamp measurements using a micromachined electrostatic actuator

The authors describe a method for biomolecular force clamp measurements using atomic force microscope (AFM) cantilevers and micromachined membrane-based electrostatic actuators. The actuators comprise of Parylene membranes with embedded side actuation electrodes and are fabricated on a silicon substrate. The devices have a displacement range of 1.8 μm with 200 V actuation voltage, and displacement uncertainty is 0.8 nm, including the noise and drift. The settling time, limited by the particular amplifier is 5 ms, with an inherent range down to 20 μs. A force clamp measurement setup using these actuators in a feedback loop has been used to measure bond life-times between human IgG and anti-human IgG molecules to demonstrate the feasibility of this method for biological experiments. The experimental findings are compared with a molecular pulling experiment and the results are found to be in good agreement. -- Highlights: ► We fabricate and characterize micromachined electrostatic actuators for AFM. ► We integrate the actuators to an AFM system and build a force-clamp setup. ► We develop a software-based controller for the force-clamp setup. ► We perform biomolecular experiments to assess molecular bond life-times. ► We compared the biological results with the conventional AFM methods.