Modification of composite por -Si/SnO_x power ion beam of nanosecond duration

The results of XPS (X-ray photoelectron spectroscopy), AES (Auger electron spectroscopy) and SEM (Scanning electron microscopy) investigation of tin oxide nanolayers on the samples of the composite por-Si/SnO_x with different porosity of the matrix, formed under the influence of a powerful ion beam of nanosecond duration was presented. It is shown that fast melting and crystallization of the surface leads to the formation of globular structures with a typical size of 200 nm. Established that the tin is included in structure of the nanocomposite in the oxidized state with little inclusion of metallic β-tin. With increasing porosity, phase composition of nanolayers of tin is close to the state corresponding to the higher tin oxide SnO₂. Also shows that with increasing porosity, the intensity of subvalent 4d lines of tin, which is apparently associated with an increased degree of hybridization of the tin atoms and oxygen atoms. According to the results stratified etching was to evaluate the changes of the elemental structure of the composite and the depth of penetration of tin. (authors)