Published 1996 | Version v1
Book Metadata-only

The effect of nitrogen content on the properties of TiN films

Creators

  • 1. Salford Univ. (United Kingdom). Dept. of Electrical Engineering
  • 2. Rossijskaya Akademiya Nauk, Moscow (Russian Federation)

Description

Titanium nitride TiNx layers have been deposited on steel substrates by unbalanced magnetron sputtering. The film microhardness was found to have a maximum at x ∼0.9. For this value of x a maximum content of carbon, the high lattice distortion (especially for the (200) plane) and a maximum in the proportion of nitrogen with almost saturated bonds with Ti atoms was observed. (author). 5 refs., 5 figs

Part of:
Trends and new applications in thin films

Additional details

Publishing Information

Publisher
Societe Francaise du Vide.
Imprint Place
Paris (France)
Imprint Title
Trends and new applications in thin films
Imprint Pagination
298 p.
Journal Page Range
p. 209-211.

Conference

Title
5. International Symposium on Trends and New Applications in Thin Films.
Dates
1-3 Apr 1996.
Place
Colmar (France).

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
28000400
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BRAGG REFLECTION; CHEMICAL BONDS; CONCENTRATION RATIO; CRYSTAL DEFECTS; CRYSTAL GROWTH; GRAIN SIZE; KNOOP HARDNESS; LATTICE PARAMETERS; MAGNETRONS; MICROHARDNESS; NITROGEN; PHOTOELECTRON SPECTROSCOPY; PLASMA ARC SPRAYING; RESIDUAL STRESSES; SPUTTERING; STOICHIOMETRY; THIN FILMS; TITANIUM NITRIDES; WEAR RESISTANCE; X-RAY DIFFRACTION; X-RAY SPECTROSCOPY
Descriptors DEC
COHERENT SCATTERING; CRYSTAL STRUCTURE; DEPOSITION; DIFFRACTION; ELECTRON SPECTROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; HARDNESS; MECHANICAL PROPERTIES; MICROSTRUCTURE; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PNICTIDES; REFLECTION; SCATTERING; SIZE; SPECTROSCOPY; SPRAY COATING; STRESSES; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information