Published February 15, 1991
| Version v1
Journal article
In situ formation of Y-Ba-Cu-O epitaxial films by 40.68-MHz rf magnetron sputtering
- 1. Materials Research Laboratories, Industry Technology Research Institute, Hsinchu, Taiwan, Republic of China (TW)
Description
The in situ epitaxial growth of the Y-Ba-Cu-O films on MgO (001) was carried out by 40.68- MHz rf magnetron sputtering with an on-axis single target. It appeared that the rf discharge strongly affected film composition, crystallinity, superconductivity, and reproducibility. Highly orientated superconducting films with the c-axis perpendicular to the substrate surfaces and having zero resistance transition temperature of 78.2 K were obtained without a post-annealing
Additional details
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 69
- Journal Issue
- 4
- Series
- J. Appl. Phys.
- Journal Page Range
- 2731-2733
- ISSN
- 0021-8979
- CODEN
- JAPIA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 22054640
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Descriptors DEI
- BARIUM OXIDES; CHEMICAL COMPOSITION; COPPER OXIDES; CRITICAL CURRENT; EPITAXY; FILMS; HIGH-TC SUPERCONDUCTORS; MAGNESIUM OXIDES; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SPUTTERING; SUBSTRATES; TRANSITION TEMPERATURE; X-RAY DIFFRACTION; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; COPPER COMPOUNDS; CRYSTAL STRUCTURE; CURRENTS; DIFFRACTION; ELECTRIC CURRENTS; ELECTRON MICROSCOPY; MAGNESIUM COMPOUNDS; MICROSCOPY; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SCATTERING; SUPERCONDUCTORS; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS