Published April 16, 1989
| Version v1
Journal article
Silicon nitride layers on tool steel produced by ion beam mixing and ion beam assisted deposition
Creators
- 1. Zentralinstitut fuer Kernforschung, Rossendorf (German Democratic Republic)
- 2. Leipzig Univ. (German Democratic Republic). Sektion Chemie
Description
Silicon nitride layers on tool steel are produced both, by Kr+ implantation into reactively sputtered Si3N4 on steel (ion beam mixing) and N2+ implantation into evaporated Si on steel (ion beam assisted deposition). Atomic concentration profiles of Fe and Si measured by RBS and XPS show interface mixing. After ion beam assisted deposition complete Si-N compound formation takes place as shown by XPS. Ion beam mixing of Si3N4/steel decreases the etch rate in hydrochloric acid by 50% with respect to uncovered steel. After flash lamp annealing the ion irradiated silicon nitride layer becomes stable against the aggressive acid used. (author)
Additional details
Publishing Information
- Journal Title
- Physica Status Solidi A
- Journal Volume
- 112
- Journal Issue
- 2
- Series
- Phys. Status Solidi A.
- Journal Page Range
- 533-539
- ISSN
- 0031-8965
- CODEN
- PSSAB
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- German Democratic Republic
- INIS RN
- 20073351
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ANNEALING; CHEMICAL RADIATION EFFECTS; CORROSION RESISTANCE; ETCHING; INTERFACES; ION IMPLANTATION; LAYERS; LOW ALLOY STEELS; MANGANESE ALLOYS; MIXING; NITROGEN 14 BEAMS; PHOTOELECTRON SPECTROSCOPY; PHYSICAL RADIATION EFFECTS; RUTHERFORD SCATTERING; SILICON; SILICON NITRIDES; SPUTTERING; TOOLS; VAPOR DEPOSITED COATINGS
- Descriptors DEC
- ALLOYS; BEAMS; CARBON ADDITIONS; COATINGS; ELASTIC SCATTERING; ELECTRON SPECTROSCOPY; ELEMENTS; EQUIPMENT; HEAT TREATMENTS; ION BEAMS; IRON ALLOYS; IRON BASE ALLOYS; NITRIDES; NITROGEN COMPOUNDS; RADIATION EFFECTS; SCATTERING; SEMIMETALS; SILICON COMPOUNDS; SPECTROSCOPY; STEELS