Published April 16, 1989 | Version v1
Journal article

Compositional changes of PMMA layers during 15N bombardment

  • 1. Zentralinstitut fuer Kernforschung, Rossendorf (German Democratic Republic)

Description

The behaviour is investgated of thin PMMA films during 15N2+ ion bombardment at EN = 6.50 MeV. Using the 1H(15N, αγ)12C and 12C, 16O(d, pγ) reactions the hydrogen, carbon, and oxygen contents of the layers are measured in dependence on the 15N2+ ion fluence. Strong losses of all three elements are observed and a dependence of the film composition on the nitrogen ion fluence. (author)

Additional details

Publishing Information

Journal Title
Physica Status Solidi A
Journal Volume
112
Journal Issue
2
Series
Phys. Status Solidi A.
Journal Page Range
765-768
ISSN
0031-8965
CODEN
PSSAB

Conference

Title
International conference on ion implantation in semiconductor and other materials.
Dates
12-17 Sep 1988.
Place
Lublin (Poland).