Published April 16, 1989
| Version v1
Journal article
Compositional changes of PMMA layers during 15N bombardment
- 1. Zentralinstitut fuer Kernforschung, Rossendorf (German Democratic Republic)
Description
The behaviour is investgated of thin PMMA films during 15N2+ ion bombardment at EN = 6.50 MeV. Using the 1H(15N, αγ)12C and 12C, 16O(d, pγ) reactions the hydrogen, carbon, and oxygen contents of the layers are measured in dependence on the 15N2+ ion fluence. Strong losses of all three elements are observed and a dependence of the film composition on the nitrogen ion fluence. (author)
Additional details
Publishing Information
- Journal Title
- Physica Status Solidi A
- Journal Volume
- 112
- Journal Issue
- 2
- Series
- Phys. Status Solidi A.
- Journal Page Range
- 765-768
- ISSN
- 0031-8965
- CODEN
- PSSAB
Conference
- Title
- International conference on ion implantation in semiconductor and other materials.
- Dates
- 12-17 Sep 1988.
- Place
- Lublin (Poland).
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- German Democratic Republic
- INIS RN
- 20073364
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CARBON 12 TARGET; CHEMICAL COMPOSITION; CHEMICAL RADIATION EFFECTS; DEUTERON REACTIONS; HYDROGEN 1 TARGET; ION IMPLANTATION; LAYERS; MEV RANGE 01-10; NITROGEN 15 BEAMS; NITROGEN 15 REACTIONS; NUCLEAR REACTION ANALYSIS; OXYGEN 16 TARGET; PHYSICAL RADIATION EFFECTS; PMMA; RADIATION FLUX
- Descriptors DEC
- BEAMS; CHEMICAL ANALYSIS; ENERGY RANGE; ESTERS; HEAVY ION REACTIONS; ION BEAMS; MEV RANGE; NONDESTRUCTIVE ANALYSIS; NUCLEAR REACTIONS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; POLYACRYLATES; POLYMERS; POLYVINYLS; RADIATION EFFECTS; TARGETS