Published September 2019
| Version v1
Journal article
Plasma-Chemical Deposition of Diamond-Like Films onto the Surface of Heavily Doped Single-Crystal Diamond
Creators
- 1. Institute for Physics of Microstructures, Russian Academy of Sciences (Russian Federation)
Description
The plasma-chemical deposition of diamond-like carbon (DLC) films onto heavily boron-doped single-crystal p-type diamond (the concentration ~1020 cm–3) in CH4 + Ar plasma is conducted. The deposition rate is 7 nm min–1. The elemental composition and properties of the films are studied in detail. It is found that the films are enriched with hydrogen, possess a density of 2.4 g cm–3, and exhibit an ultrasmooth surface (with a roughness of 0.4 ± 0.2 nm).
Additional details
Identifiers
Publishing Information
- Journal Title
- Semiconductors (Woodbury, N.Y., Print)
- Journal Volume
- 53
- Journal Issue
- 9
- Journal Page Range
- p. 1203-1206
- ISSN
- 1063-7826
- CODEN
- SMICES
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 51109067
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ARGON; BORON; CHEMICAL VAPOR DEPOSITION; CONCENTRATION RATIO; DENSITY; DEPOSITION; DIAMONDS; DOPED MATERIALS; HYDROGEN; METHANE; MONOCRYSTALS; PLASMA; ROUGHNESS; SURFACES; THIN FILMS
- Descriptors DEC
- ALKANES; CARBON; CHEMICAL COATING; CRYSTALS; DEPOSITION; DIMENSIONLESS NUMBERS; ELEMENTS; FILMS; FLUIDS; GASES; HYDROCARBONS; MATERIALS; MINERALS; NONMETALS; ORGANIC COMPOUNDS; PHYSICAL PROPERTIES; RARE GASES; SEMIMETALS; SURFACE COATING; SURFACE PROPERTIES
Optional Information
- Copyright
- Copyright (c) 2019 Pleiades Publishing, Ltd.