Published August 2008 | Version v1
Journal article

Real-time control of track etching and recent experiments relevant to micro and nano fabrication

  • 1. European Network of Ion Track Technology EuNITT (Germany)
  • 2. Gesellschaft fur Schwerionenforschung mbH, Darmstadt, Planckstr. 1, D-64291 Darmstadt (Germany)

Description

Part (1) of the report sketches a computer controlled electrolytic cell system for track etching and electro replication. Track and bulk etch rates are determined in real-time. Processing can be stopped at a prescribed parameter, e.g. current, diameter, or charge. The system can be used to rapidly screen prospective track sensitive materials, selective etchants, and electro replication processes, and can thus reduce the number of necessary SEM observations. Part (2) of the report describes recent experiments relevant to micro and nano fabrication

Availability note (English)

Available from http://dx.doi.org/10.1016/j.radmeas.2008.03.078

Additional details

Identifiers

DOI
10.1016/j.radmeas.2008.03.078;
PII
S1350-4487(08)00136-4;

Publishing Information

Journal Title
Radiation Measurements
Journal Volume
43
Journal Issue
suppl.1
Journal Page Range
p. S560-S570
ISSN
1350-4487
CODEN
RMEAEP

Conference

Title
23. international conference on nuclear tracks in solids
Dates
11-15 Sep 2006
Place
Beijing (China)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
40008355
Subject category
S61: RADIATION PROTECTION AND DOSIMETRY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTROLYTIC CELLS; ETCHING; FABRICATION; PARTICLE TRACKS; SCANNING ELECTRON MICROSCOPY
Descriptors DEC
ELECTRON MICROSCOPY; MICROSCOPY; SURFACE FINISHING

Optional Information

Copyright
Copyright (c) 2008 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.