Published August 2008
| Version v1
Journal article
Real-time control of track etching and recent experiments relevant to micro and nano fabrication
Creators
- 1. European Network of Ion Track Technology EuNITT (Germany)
- 2. Gesellschaft fur Schwerionenforschung mbH, Darmstadt, Planckstr. 1, D-64291 Darmstadt (Germany)
Description
Part (1) of the report sketches a computer controlled electrolytic cell system for track etching and electro replication. Track and bulk etch rates are determined in real-time. Processing can be stopped at a prescribed parameter, e.g. current, diameter, or charge. The system can be used to rapidly screen prospective track sensitive materials, selective etchants, and electro replication processes, and can thus reduce the number of necessary SEM observations. Part (2) of the report describes recent experiments relevant to micro and nano fabrication
Availability note (English)
Available from http://dx.doi.org/10.1016/j.radmeas.2008.03.078Additional details
Identifiers
- DOI
- 10.1016/j.radmeas.2008.03.078;
- PII
- S1350-4487(08)00136-4;
Publishing Information
- Journal Title
- Radiation Measurements
- Journal Volume
- 43
- Journal Issue
- suppl.1
- Journal Page Range
- p. S560-S570
- ISSN
- 1350-4487
- CODEN
- RMEAEP
Conference
- Title
- 23. international conference on nuclear tracks in solids
- Dates
- 11-15 Sep 2006
- Place
- Beijing (China)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 40008355
- Subject category
- S61: RADIATION PROTECTION AND DOSIMETRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ELECTROLYTIC CELLS; ETCHING; FABRICATION; PARTICLE TRACKS; SCANNING ELECTRON MICROSCOPY
- Descriptors DEC
- ELECTRON MICROSCOPY; MICROSCOPY; SURFACE FINISHING
Optional Information
- Copyright
- Copyright (c) 2008 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.