A study of reconstruction algorithms and filters for an industrial X-ray tomography system

Computed tomography (CT) has been incorporated in an industrial Diode-Array Digital Radiography (DADR) system. An input data size of 512 pixel points x 400 projections yielded a 400x400 output image matrix. Reconstruction algorithms used are the filtered backprojection (FBP) and the direct Fourier reconstruction (DFR). Various filters were used in the FBP reconstruction process and their effects on image quality were evaluated. A spatial resolution of 100 μm was measured with a block of plates and a minimum detectable feature size in the range of 10-100 μm was measured using thin wires. Industrial specimens imaged have included ceramic samples, ball bearings and integrated circuits. A number of engineering problems have been solved, such as adjustment of the X-ray source, centering of the rotator spindle in the view field and beam-hardening corrections. (orig.)