Published June 1, 2010 | Version v1
Journal article

Morphological and structural characterization of WO3 and Cr-WO3 thin films synthesized by sol-gel process

  • 1. Istituto per la Microelettronica e i Microsistemi, IMM-CNR, Via Monteroni, 73100 Lecce (Italy)
  • 2. ICREA Research Professor at Institut de Ciencia de Materials de Barcelona, CSIC, 08193 Bellaterra, CAT (Spain)
  • 3. MIND-IN2UB, Dept. Electronica, Universitat de Barcelona, Marti i Franques 1, 08028 Barcelona, CAT (Spain)
  • 4. M2E/XaRMAE/IN2UB, Departament d'Electronica, Universitat de Barcelona, C. Marti i Franques 1, 08028 Barcelona, CAT (Spain)
  • 5. Institut de Recerca en Energia de Catalunya (IREC), C/ Josep Pla 2, B2, bx, E-08019 Barcelona (Spain)

Description

WO3 thin films were prepared by spin-coating methanol solutions of a tungsten chloromethoxide, and easily modified with Cr by the addition of Cr 2-ethylhexanoate. The films were heat-treated up to 700 oC, and characterized by X-ray diffraction, Scanning Electron Microscopy, Transmission Electron Microscopy and Electron Energy Loss spectroscopy. The film morphology was rough and porous, not depending on Cr presence, while their structure was constituted by packed spheroidal or elongated dense structures, giving rise to the peculiar film surface morphology. Cr was distributed in the film structure without phase separations, up to as high as 5% Cr atomic concentration.

Availability note (English)

Available from http://dx.doi.org/10.1016/j.tsf.2009.12.019

Additional details

Identifiers

DOI
10.1016/j.tsf.2009.12.019;
PII
S0040-6090(09)02001-X;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
518
Journal Issue
16
Journal Page Range
p. 4512-4514
ISSN
0040-6090
CODEN
THSFAP

Conference

Title
Synthesis, processing and characterization of nanoscale multi functional oxide films II
Acronym
EMRS 2009 spring meeting Symposium H
Dates
8-12 Jun 2009
Place
Strasbourg (France)

Optional Information

Copyright
Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.