Properties of Cr(C,N) hard coatings deposited in Ar-C2H2-N2 plasma
Description
Several chromium carbonitride (Cr-(C,N)) coatings were prepared with different C:N ratios by varying the N2 and C2H2 flow. Chromium nitride (Cr-N) and chromium carbide (Cr-C) coatings were also prepared for comparison. The coatings were deposited in two different ion-plating systems: by reactive evaporation in BAI730M (Balzers) apparatus at high temperature (450 deg. C) and by reactive sputtering in plasma-beam Sputron (Balzers) apparatus at low temperature (200 deg. C). Among mechanical properties microhardness, adhesion (measured by scratch test) and surface roughness were evaluated. Oxidation of the coatings was carried out by heating the samples at temperatures of 750-900 deg. C in an oxygen atmosphere. Crystal structure and microstructure were studied by XRD, TEM and SEM. Chemical State of the elements was observed by XPS. The concentration and depth profiles of the samples oxidized at various temperatures were measured by AES, EDX and GDOES
Additional details
Identifiers
- DOI
- 10.1016/S0040-6090;
- PII
- S0040609003003286;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 433
- Journal Issue
- 1-2
- Journal Page Range
- p. 174-179
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- 12. international conference on thin films
- Dates
- 15-20 Sep 2002
- Place
- Bratislava (Slovakia)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37013319
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- AUGER ELECTRON SPECTROSCOPY; CHROMIUM; CHROMIUM CARBIDES; CHROMIUM NITRIDES; COATINGS; CRYSTAL DEFECTS; EVAPORATION; GADOLINIUM OXIDES; MICROHARDNESS; MICROSTRUCTURE; OXIDATION; PLASMA; PLATING; SCANNING ELECTRON MICROSCOPY; SPUTTERING; TEMPERATURE RANGE 0400-1000 K; TEMPERATURE RANGE 1000-4000 K; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY
- Descriptors DEC
- CARBIDES; CARBON COMPOUNDS; CHALCOGENIDES; CHEMICAL REACTIONS; CHROMIUM COMPOUNDS; COHERENT SCATTERING; CRYSTAL STRUCTURE; DEPOSITION; DIFFRACTION; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; ELEMENTS; GADOLINIUM COMPOUNDS; HARDNESS; MECHANICAL PROPERTIES; METALS; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; PHOTOELECTRON SPECTROSCOPY; PNICTIDES; RARE EARTH COMPOUNDS; SCATTERING; SPECTROSCOPY; SURFACE COATING; TEMPERATURE RANGE; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS
Optional Information
- Copyright
- Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.