Published November 1, 1983
| Version v1
Journal article
Study of atomic excitations in sputtering with the use of Mg, Al, Ca, and Cd targets
Creators
- 1. Physics Laboratory II, H.C. Orsted Institute, Universitetsparken 5, DK-2100 Copenhagen, Denmark
Description
Solid targets of Mg, Al, Ca, and Cd have been bombarded with 80-keV Ar+ ions. Photon emission from sputtered particles has been measured and converted to relative level populations. The experimental results are discussed in terms of a set of basic considerations outlined for atomic excitations in sputtering processes
Additional details
Publishing Information
- Journal Title
- Phys. Rev., B: Condens. Matter
- Journal Volume
- 28
- Journal Issue
- 9
- Series
- Phys. Rev., B: Condens. Matter.
- Journal Page Range
- 5029-5036
- ISSN
- 0163-1829
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 15034589
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- ALUMINIUM; ARGON IONS; CADMIUM; CALCIUM; COLLISIONS; EXCITATION; KEV RANGE 10-100; MAGNESIUM; PHOTON EMISSION; SPUTTERING
- Descriptors DEC
- ALKALINE EARTH METALS; CHARGED PARTICLES; ELEMENTS; EMISSION; ENERGY RANGE; ENERGY-LEVEL TRANSITIONS; IONS; KEV RANGE; METALS