Published March 16, 1989 | Version v1
Journal article

Ion implantation studies of collison cascades in solids

Creators

  • 1. Institute for Nuclear Studies, Otwock-Swierk (Poland)

Description

The basic mechanisms are reviewed which determine the lattice site occupation of impurities implantd into metals. The experimental results demonstrate that the implanted atoms occupy substitutional sites during the relaxation phase of the collision cascade. Their subsequent displacements are due to the interaction with point defects. (author)

Additional details

Publishing Information

Journal Title
Physica Status Solidi A
Journal Volume
112
Journal Issue
1
Series
Phys. Status Solidi A.
Journal Page Range
253-261
ISSN
0031-8965
CODEN
PSSAB

Conference

Title
International conference on ion implantation in semiconductors and other materials.
Dates
12-17 Sep 1988.
Place
Lublin (Poland).