Published March 2021
| Version v1
Journal article
High voltage microfocus X-ray CT system for metrological application
Description
In recent years, X-ray CT has been used in a wide range of fields as an inspection device. Nikon Corporation has independently developed a high-acceleration, high-output microfocus X-ray source and a CT system device using it in order to apply them to larger and higher-density parts. This paper introduces the development state of this system unit and the measurement function using this device. (A.O.)
Additional details
Additional titles
- Original title (Japanese)
- 高加速マイクロフォーカス計測用X線CTシステム
Publishing Information
- Journal Title
- Kensa Gijutsu
- Journal Volume
- 26
- Journal Issue
- 3
- Series
- 雑誌名:検査技術
- Journal Page Range
- p. 35-41
- ISSN
- 1342-9825
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 52118686
- Subject category
- S62: RADIOLOGY AND NUCLEAR MEDICINE; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- ACCURACY; ERRORS; IMAGES; PHOTON BEAMS; PHOTON COMPUTED TOMOGRAPHY; TARGETS; X RADIATION; X-RAY RADIOGRAPHY; X-RAY SOURCES
- Descriptors DEC
- BEAMS; COMPUTERIZED TOMOGRAPHY; DIAGNOSTIC TECHNIQUES; ELECTROMAGNETIC RADIATION; INDUSTRIAL RADIOGRAPHY; IONIZING RADIATIONS; MATERIALS TESTING; NONDESTRUCTIVE TESTING; RADIATION SOURCES; RADIATIONS; TESTING; TOMOGRAPHY
Optional Information
- Notes
- 15 refs., 8 figs., 2 photos