Published March 2021 | Version v1
Journal article

High voltage microfocus X-ray CT system for metrological application

Creators

  • 1. Nikon Corporation, Digital Solutions Business Unit, Tokyo (Japan)

Description

In recent years, X-ray CT has been used in a wide range of fields as an inspection device. Nikon Corporation has independently developed a high-acceleration, high-output microfocus X-ray source and a CT system device using it in order to apply them to larger and higher-density parts. This paper introduces the development state of this system unit and the measurement function using this device. (A.O.)

Additional details

Additional titles

Original title (Japanese)
高加速マイクロフォーカス計測用X線CTシステム

Publishing Information

Journal Title
Kensa Gijutsu
Journal Volume
26
Journal Issue
3
Series
雑誌名:検査技術
Journal Page Range
p. 35-41
ISSN
1342-9825

Optional Information

Notes
15 refs., 8 figs., 2 photos