Studies of film growth processes and surface structural characterization of ferroelectric memory-compatible SrBi2Ta2O9 layered perovskites via in situ, real-time ion-beam analysis
- 1. Argonne National Laboratory, Materials Science and Chemistry Divisions, Argonne, Illinois 60439 (United States)
- 2. University of North Carolina, Chemistry Department, Chapel Hill, North Carolina 27599-3290 (United States)
- 3. Northwestern University, Department of Materials Science, Evanston, Illinois 60208 (United States)
- 4. MCNC, Electronic Technologies Division, 3021 Cornwallis Rd., Research Triangle Park, North Carolina 27709-2889 (United States)
Description
In situ, real-time studies of layered perovskite SrBi2Ta2O9 (SBT) film growth processes were performed using a time-of-flight ion scattering and recoil spectroscopy (TOF ISARS) technique. These studies revealed two important features related to the synthesis of SBT films via ion-beam sputter-deposition, namely: (a) atomic oxygen originating from a multicomponent SBT target during the sputtering process is incorporated in the growing film more efficiently than molecular oxygen; and (b) the SBT surface appears to be terminated in an incomplete (Bi2O2)2+layer with a top surface of oxygen atoms, which may be responsible for the high resistance to polarization fatigue exhibited by Pt/SBT/Pt capacitors. copyright 1996 American Institute of Physics
Additional details
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 69
- Journal Issue
- 18
- Journal Page Range
- p. 2671-2673.
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 28007243
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- BISMUTH OXIDES; CRYSTAL STRUCTURE; FERROELECTRIC MATERIALS; GROWTH; ION SCATTERING ANALYSIS; MEMORY DEVICES; PEROVSKITES; RECOILS; STRONTIUM OXIDES; SURFACES; TANTALUM OXIDES; THIN FILMS
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BISMUTH COMPOUNDS; CHALCOGENIDES; CHEMICAL ANALYSIS; DIELECTRIC MATERIALS; FILMS; MATERIALS; MINERALS; NONDESTRUCTIVE ANALYSIS; OXIDES; OXYGEN COMPOUNDS; STRONTIUM COMPOUNDS; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS