Published June 24, 2015 | Version v1
Journal article Metadata-only

Large area fabrication of plasmonic nanoparticle grating structure by conventional scanning electron microscope

Creators

  • 1. Indus Synchrotron Utilization Division, Raja Ramanna Centre for Advance Technology, Indore-452013 (India)
  • 2. Mechanical & Optical Support Section, Raja Ramanna Centre for Advance Technology, Indore 452013 (India)

Description

Plasmonic nanoparticle grating (PNG) structure of different periods has been fabricated by electron beam lithography using silver halide based transmission electron microscope film as a substrate. Conventional scanning electron microscope is used as a fabrication tool for electron beam lithography. Optical microscope and energy dispersive spectroscopy (EDS) have been used for its morphological and elemental characterization. Optical characterization is performed by UV-Vis absorption spectroscopic technique

Additional details

Identifiers

DOI
10.1063/1.4917690;

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
1665
Journal Issue
1
Journal Page Range
vp.
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
59. DAE solid state physics symposium 2014
Dates
16-20 Dec 2014
Place
Tamilnadu (India)

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
47060315
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ABSORPTION; ABSORPTION SPECTROSCOPY; ELECTRON BEAMS; FABRICATION; FILMS; PLASMONS; SCANNING ELECTRON MICROSCOPY; SILVER HALIDES; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET SPECTRA; VISIBLE SPECTRA; X-RAY SPECTROSCOPY
Descriptors DEC
BEAMS; ELECTRON MICROSCOPY; HALIDES; HALOGEN COMPOUNDS; LEPTON BEAMS; MICROSCOPY; PARTICLE BEAMS; QUASI PARTICLES; SILVER COMPOUNDS; SORPTION; SPECTRA; SPECTROSCOPY; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
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