Confocal X-ray fluorescence analysis of samples formed from homogeneous layers: comparison of simulations with experimental measurements

Confocal X-ray fluorescence analysis is a non-destructive method that enables the determination of the elements depth distribution in the examined sample. Accurate determination of the elements depth distributions in various samples from measured depth profiles is very demanding, and generally, a valid procedure has not been developed as yet. The main aim of this work was to design and test a universal simplified calculation procedure, which would allow the calculation of the approximate shape of the depth profiles for a sample formed from layers of a given thickness and composition. To confirm the proposed calculation method, the standard reference material NIST 1412 was used, which is formed by a homogeneous multicomponent glass containing oxides of several measurable elements. This research compares the results of the measured and calculated depth profiles in the glass reference material, where the resulting depth curves correspond almost perfectly. (authors)