Published February 1972 | Version v1
Journal article

Activation analysis of trace impurities in silicon single crystals and in thin layers of SiO2 and Si3N4 on silicon

  • 1. Tesla, Prague (Czechoslovakia). Vyzkumny Ustav pro Sdelovaci Techniku
  • 2. Ustav Jaderneho Vyzkumu, Rez (Czechoslovakia)

Description

no abstract available

Additional details

Additional titles

Original title (Czech)
Aktivacni analyza stopovych necistot v monokrystalickem kremiku a v tenkych vrstvach SiO

Publishing Information

Journal Title
Radioisotopy
Journal Volume
13
Journal Issue
2
Series
Radioisotopy.
Journal Page Range
253-264

INIS

Country of Publication
Serbia and Montenegro
Country of Input or Organization
Serbia and Montenegro
INIS RN
4050120
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Is Lead record
Yes
Descriptors DEI
ACCURACY; ACTIVATION ANALYSIS; IMPURITIES; MONOCRYSTALS; PILE NEUTRONS; QUARTZ; SAMPLE PREPARATION; SILICON; SILICON NITRIDES; TRACE AMOUNTS
Descriptors DEC
BARYONS; CHEMICAL ANALYSIS; CRYSTALS; ELEMENTARY PARTICLES; ELEMENTS; FERMIONS; HADRONS; NEUTRONS; NITRIDES; NUCLEONS; OXIDES; SEMIMETALS; SILICON COMPOUNDS; SILICON OXIDES

Optional Information

Notes
16 refs.