Published 1999
| Version v1
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Solution of kinetic equations for heavy ion channeling and analysis of long-range fraction in ion implantation
Creators
- 1. Chuvashskij Gosudarstvennyj Univ., Cheboksary (Russian Federation)
Description
no abstract available
Files
30050846.pdf
Files
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Additional details
Additional titles
- Original title (Russian)
- Решение кинетических уравнений для каналирования тяжелых ионов и анализ дальнопробежной фракции при ионном имплантировании
Publishing Information
- Publisher
- Moskovskij Gosudarstvennyj Univ.
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Abstracts of the reports from the 29. International conference on physical aspects of charge particle interactions with crystals
- Imprint Pagination
- 139 p.
- Journal Page Range
- p. 45
- Report number
- INIS-RU--434
Conference
- Title
- 29. International conference on physical aspects of charged particle interactions with crystals
- Original Conference Title
- 29. Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 31 May - 2 Jun 1999
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 30050846
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ALUMINIUM IONS; CALCIUM IONS; CRYSTALS; GREEN FUNCTION; HEAVY IONS; ION CHANNELING; ION IMPLANTATION; KINETIC EQUATIONS; PHOSPHORUS IONS; SILICON; SLOWING-DOWN LENGTH
- Descriptors DEC
- CHANNELING; CHARGED PARTICLES; DIMENSIONS; ELEMENTS; EQUATIONS; FUNCTIONS; IONS; LENGTH; SEMIMETALS
Optional Information
- Notes
- 3 refs. Imprint:Tezisy dokladov 29. Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami