Can quantum dots be analysed with macrobeam RBS?

One of the greatest challenges to the continuing relevance of RBS for modern materials development is the decreasing scale of structures that need to be characterised. While continuing the development of newer and better hardware is essential, this work follows a different approach: we develop physical models to describe the influence of inclusions in RBS spectra, and implement them in the standard data analysis code NDF. We show that, while complementary information from other techniques is almost always necessary, macrobeam RBS can contribute significant information. We apply the models developed to Ge quantum dots in Si