Dynamic performance analysis of a micro cantilever embedded in elastomer

This paper reports on the dynamic characteristics of a micro silicon standing cantilever embedded in a silicone elastomer, polydimethylsiloxane (PDMS). This combined structure, which consists of materials with significantly different Young's moduli, is employed as a tactile sensor for shear-strain measurement. The frequency responses of the tactile sensor show no resonance near the intrinsic resonant frequency of the standing cantilever, whereas the resonant point was observed near the intrinsic resonant frequency of the PDMS covering. In addition, when the oscillation frequency is below the resonant frequency of the tactile sensor, the standing cantilever can follow the oscillating deformation of the PDMS covering with no delay, and the sensitivity of the tactile sensor does not change. The analytical and experimental results show that the PDMS covering has a dominant influence on the dynamic behavior of the embedded cantilever, and the tactile sensor can be applied to both static and oscillating input in the same way. (paper)