Published November 2004 | Version v1
Journal article Metadata-only

Collective Thomson scattering experiments on a tin vapor discharge in the prepinch phase

Creators

  • 1. ISAN, Troitsk, Moscow Region 142092 (Russian Federation)
  • 2. ASML Netherlands B.V., De Run 6501, 5504 DR Veldhoven (Netherlands)
  • 3. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven (Netherlands)

Description

Partially collective Thomson scattering measurements have been performed on a triggered vacuum arc in tin vapor, which is a candidate source of extreme ultraviolet light for application in semiconductor lithography. In this paper, results on the electron densities and temperatures are presented for the prepinch phase of the discharge. Electron densities and temperatures increase from 1x1023 m-3 to 1x1024 m-3 and from 5 eV to over 30 eV, respectively, in about 100 ns. The results are confirmed by Stark broadening data

Additional details

Identifiers

DOI
10.1103/PhysRevE.70.056413;

Publishing Information

Journal Title
Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics
Journal Volume
70
Journal Issue
5
Journal Page Range
p. 056413-056413.7
ISSN
1063-651X
CODEN
PLEEE8

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
36080211
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
ELECTRON DENSITY; ELECTRON TEMPERATURE; EV RANGE 01-10; EV RANGE 10-100; EXTREME ULTRAVIOLET RADIATION; SEMICONDUCTOR MATERIALS; THOMSON SCATTERING; TIN; VAPORS; VISIBLE RADIATION
Descriptors DEC
ELECTROMAGNETIC RADIATION; ELEMENTS; ENERGY RANGE; EV RANGE; FLUIDS; GASES; INELASTIC SCATTERING; MATERIALS; METALS; RADIATIONS; SCATTERING; ULTRAVIOLET RADIATION

Optional Information

Notes
(c) 2004 The American Physical Society