Giant growth of single crystalline Ge on insulator by seeding lateral liquid-phase epitaxy
- 1. Department of Electronics, Kyushu University, Fukuoka 819-0395 (Japan)
- 2. Department of Applied Science for Electronics and Materials, Kyushu University, Fukuoka 816-8580 (Japan)
Description
Giant growth (∼ 400 μm length) of single crystalline Ge on insulator (GOI) with (100), (110), and (111) orientations is demonstrated by lateral liquid-phase epitaxy (L-LPE) using Si(100), (110), and (111) substrates, respectively, as the seeds. The micro-probe Raman measurements and transmission electron microscopy observations showed that the growth regions were of very high crystal quality and were defect free. In addition, lateral diffusion of Si atoms was observed only in the regions near the seeding edges (∼ 100 μm). Based on these findings, the trigger for the giant growth of the high-quality GOI was discussed considering the solidification temperature gradient due to Si-Ge mixing and the thermal gradient due to the latent heat at the growth front.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.tsf.2009.10.081Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2009.10.081;
- PII
- S0040-6090(09)01724-6;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 518
- Journal Issue
- 6
- Journal Page Range
- p. S170-S173
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- 6. international conference on silicon epitaxy and heterostructures
- Acronym
- ICSI-6
- Dates
- 17-22 May 2009
- Place
- Los Angeles, CA (United States)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 42058129
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CRYSTAL GROWTH; DIFFUSION; GERMANIUM; HEAT; LIQUID PHASE EPITAXY; MIXING; MONOCRYSTALS; ORIENTATION; SILICON; SOLIDIFICATION; TEMPERATURE GRADIENTS; TRANSMISSION ELECTRON MICROSCOPY
- Descriptors DEC
- CRYSTAL GROWTH METHODS; CRYSTALS; ELECTRON MICROSCOPY; ELEMENTS; ENERGY; EPITAXY; METALS; MICROSCOPY; PHASE TRANSFORMATIONS; SEMIMETALS
Optional Information
- Copyright
- Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.