Published January 1, 2010 | Version v1
Journal article

Giant growth of single crystalline Ge on insulator by seeding lateral liquid-phase epitaxy

  • 1. Department of Electronics, Kyushu University, Fukuoka 819-0395 (Japan)
  • 2. Department of Applied Science for Electronics and Materials, Kyushu University, Fukuoka 816-8580 (Japan)

Description

Giant growth (∼ 400 μm length) of single crystalline Ge on insulator (GOI) with (100), (110), and (111) orientations is demonstrated by lateral liquid-phase epitaxy (L-LPE) using Si(100), (110), and (111) substrates, respectively, as the seeds. The micro-probe Raman measurements and transmission electron microscopy observations showed that the growth regions were of very high crystal quality and were defect free. In addition, lateral diffusion of Si atoms was observed only in the regions near the seeding edges (∼ 100 μm). Based on these findings, the trigger for the giant growth of the high-quality GOI was discussed considering the solidification temperature gradient due to Si-Ge mixing and the thermal gradient due to the latent heat at the growth front.

Availability note (English)

Available from http://dx.doi.org/10.1016/j.tsf.2009.10.081

Additional details

Identifiers

DOI
10.1016/j.tsf.2009.10.081;
PII
S0040-6090(09)01724-6;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
518
Journal Issue
6
Journal Page Range
p. S170-S173
ISSN
0040-6090
CODEN
THSFAP

Conference

Title
6. international conference on silicon epitaxy and heterostructures
Acronym
ICSI-6
Dates
17-22 May 2009
Place
Los Angeles, CA (United States)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
42058129
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CRYSTAL GROWTH; DIFFUSION; GERMANIUM; HEAT; LIQUID PHASE EPITAXY; MIXING; MONOCRYSTALS; ORIENTATION; SILICON; SOLIDIFICATION; TEMPERATURE GRADIENTS; TRANSMISSION ELECTRON MICROSCOPY
Descriptors DEC
CRYSTAL GROWTH METHODS; CRYSTALS; ELECTRON MICROSCOPY; ELEMENTS; ENERGY; EPITAXY; METALS; MICROSCOPY; PHASE TRANSFORMATIONS; SEMIMETALS

Optional Information

Copyright
Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.