Published 2006
| Version v1
Book
Optimization of superconducting NbN thin films deposition by reactive dc magnetron sputtering at low temperature
- 1. Technical Physics and Prototype Engg. Division, Bhabha Atomic Research Centre, Mumbai (India)
- 2. Solid State Physics Div., Bhabha Atomic Research Centre, Mumbai (India)
Description
We examined the different deposition conditions on sputter deposited niobium nitride (NbN) films. NbN phase is identified by XRD. Superconducting transition temperature (Tc) obtained by transport measurements. Depending on the sputtering power and substrate temperature, Tc's varies in the range of 9.5-14.5K. Higher power and substrate temperature seem to promote a higher Tc. (author)
Additional details
Publishing Information
- Publisher
- Prime Time Education
- Imprint Place
- Mumbai (India)
- ISBN
- 81-8372-030-7
- Imprint Title
- Proceedings of the DAE solid state physics symposium. V. 51
- Imprint Pagination
- 1058 p.
- Journal Page Range
- p. 659-660
Conference
- Title
- 51. DAE solid state physics symposium
- Dates
- 26-30 Dec 2006
- Place
- Bhopal (India)
INIS
- Country of Publication
- India
- Country of Input or Organization
- India
- INIS RN
- 38112643
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- MAGNETRONS; NIOBIUM NITRIDES; SPUTTERING; SUPERCONDUCTIVITY; THIN FILMS; TRANSITION TEMPERATURE; X-RAY DIFFRACTION
- Descriptors DEC
- COHERENT SCATTERING; DIFFRACTION; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NIOBIUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; PHYSICAL PROPERTIES; PNICTIDES; REFRACTORY METAL COMPOUNDS; SCATTERING; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- 5 refs., 2 figs., 1 tab.