Electron beam sensitivities and thermal properties of methacrylate polymers

Methyl methacrylate and other alkyl methacrylate polymers, which are known to be degradable by radiation, were investigated in order to evaluate the possibility of developing them as highly sensitive positive electron beam resists. Their electron beam exposure characteristics and thermal properties (glass transition temperature and thermal degradation point) were measured. Highly sensitive polymers tended to have decreased thermal properties. However, poly(isopropyl methacrylate) and poly(methyl methacrylate-co-isopropyl methacrylate) had sensitivities as high as poly(butene-1 sulfone), as well as higher thermal properties than those of poly(butene-1 sulfone). (author)